Ultra Low Voltage Imaging With Hitachi”S S S, Ultra Low Voltage Imaging With Hitachis S


The Hitachi S-4700 FE-SEM is a cold field emission high resolution scanning electron microscope. This SEM permits ultra high resolution imaging of thin films and semi-conductor materials on exceptionally clean specimens. It is also suitable for polymeric materials. The S-4700 is configured to detect secondary and backscattered electrons as well as characteristic X-rays. The system is fully automated and is operated via easy-to-use menu driven software.



Secondary imaging can be carried out at short working distances with an overhead detector or at longer distances with a side-mounted detector, and these SE detector signals can be isolated or mixed. Backscatter imaging can be accomplished at accelerating voltages as low as 1 kV at high resolution with the Hitachi-proprietary ExB detector. The menu based Windows software and greater automation will lead to greater ease of use for most individuals. Energy dispersive analysis is provided via an ultra thin window detector. Analysis of elements from boron through uranium is possible with this detection system.

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It is interfaced with a Gresham Titan Analog HV Power Supply / Pulse Processor and 4Pi Spectral Engine Hardware with DTSA and Revolution Software. Software is available in these packages for X-ray mapping, qualitative, standardless and rigorous standards-based quantitative analysis. The S-4700 FE-SEM system is interfaced to the campus network so all user data can be downloaded to user storage systems from the laboratory.


4pi Analysis, Inc. engineers and sells X-ray Microanalysis and Digital Imaging Systems. (NOTE: 4pi has ceased manufacturing and sales. ACMAL is confident that this will not affect 4pi’s ability to provide technical support to this lab.)




Free online eTraining is available for this instrument. This self-paced tutorial and reference content does not replace course requirements for authorized usage.

Available topics related to this instrument:


Michigan Tech offers many undergraduate and graduate courses related to materials characterization.

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